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1

Electrical breakdown at low pressure for planar microelectromechanical systems with 10-to500-μm gaps

Carazzetti, Patrick

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2009

Language:

english

File:

PDF, 777 KB

english, 2009

2

Micromachined chip-scale plasma light source

P. Carazzetti, Ph. Renaud, H. Shea

Journal:

Sensors and Actuators A: Physical

Year:

2009

Language:

english

File:

PDF, 1.15 MB

english, 2009

3

[IEEE 2017 IEEE 19th Electronics Packaging Technology Conference (EPTC) - Singapore, Singapore (2017.12.6-2017.12.9)] 2017 IEEE 19th Electronics Packaging Technology Conference (EPTC) - Indexer PVD platform — The key enabler for high productivity and low contact resistance for next-generation WLP applications

Carazzetti, Patrik, Balon, Frantisek, Hoffmann, Mike, Weichart, Juergen, Erhart, Andreas, Strolz, Ewald

Year:

2017

Language:

english

File:

PDF, 803 KB

english, 2017

4

[IEEE 2020 IEEE 70th Electronic Components and Technology Conference (ECTC) - Orlando, FL, USA (2020.6.3-2020.6.30)] 2020 IEEE 70th Electronic Components and Technology Conference (ECTC) - Evaluation of ICP Sputter Etch with Reducing Atmosphere for the Improvement of Rc in UBM/RDL Applications

Carazzetti, Patrik, Weichart, Jurgen, Erhart, Andreas, Elghazzali, Mohamed, Strolz, Ewald

Year:

2020

File:

PDF, 887 KB

2020

5

[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Low-power hermetically sealed on-chip plasma light source micromachined in glass

Carazzetti, P., Renaud, Ph., Shea, H.

Year:

2008

Language:

english

File:

PDF, 1.72 MB

english, 2008

6

SPIE Proceedings [SPIE MOEMS-MEMS 2008 Micro and Nanofabrication - San Jose, CA (Saturday 19 January 2008)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII - Experimental study of electrical breakdown in MEMS devices with micrometer scale gaps

Carazzetti, P., Renaud, Ph., Shea, H. R., Hartzell, Allyson L., Ramesham, Rajeshuni

Year:

2008

Language:

english

File:

PDF, 790 KB

english, 2008

7

[IEEE 2002 IEEE International Ultrasonics Symposium - Munich, Germany (8-11 Oct. 2002)] 2002 IEEE Ultrasonics Symposium, 2002. Proceedings. - Surface micromachined BAW resonators based on AlN

Lanz, R., Carazzetti, P., Muralt, P.

Year:

2002

Language:

english

File:

PDF, 608 KB

english, 2002

8

[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - High-performance micromachined RF planar iductors

Carazzetti, P., Dubois, M.-A., de Rooij, N.-F.

Year:

2005

Language:

english

File:

PDF, 686 KB

english, 2005

9

[IEEE 2017 IEEE 67th Electronic Components and Technology Conference (ECTC) - Orlando, FL, USA (2017.5.30-2017.6.2)] 2017 IEEE 67th Electronic Components and Technology Conference (ECTC) - Impact of Process Control on UBM/RDL Contact Resistance for Next-Generation Fan-Out Devices

Carazzetti, Patrik, Balon, Frantisek, Hoffmann, Mike, Weichart, Juergen, Erhart, Andreas, Strolz, Ewald, Viehweger, Kay

Year:

2017

Language:

english

File:

PDF, 1.41 MB

english, 2017